MICRO/NANO FABRICATION AND MACHINING LABORATORY
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CLEAN ROOM LAB
LAURELL SPIN COATER
MDA-400M-O6, Midas System Mask Aligner
µPG101 Tabletop Micro Pattern Generator,Laser Writer
Stylus Surface Profiler BRUKER DEKTAK XT
LAURELL SPIN COATER
MDA-400M-O6, Midas System Mask Aligner
µPG101 Tabletop Micro Pattern Generator,Laser Writer
Stylus Surface Profiler BRUKER DEKTAK XT