MICRO/NANO FABRICATION AND MACHINING LABORATORY
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CLEAN ROOM LAB
LAURELL SPIN COATER
MDA-400M-O6, Midas System Mask Aligner
µPG101 Tabletop Micro Pattern Generator,Laser Writer
Stylus Surface Profiler BRUKER DEKTAK XT
Micro CT Scan
(SHIMADZU SMX-1000 PLUS)
3D Optical Profiler Microscope SENSOFAR S NEOX
Electron Beam Evaporator (E-Beam),LAT
Plasma Enhanced Chemical Vapour Deposition(PECVD)
Optical Microscope Olympus BX53M
