MICRO/NANO FABRICATION AND MACHINING LABORATORY

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CLEAN ROOM LAB

LAURELL SPIN COATER

MDA-400M-O6, Midas System Mask Aligner

µPG101 Tabletop Micro Pattern Generator,Laser Writer

Stylus Surface Profiler BRUKER DEKTAK XT

Micro CT Scan

(SHIMADZU SMX-1000 PLUS)

3D Optical Profiler Microscope SENSOFAR S NEOX

Electron Beam Evaporator (E-Beam),LAT

Plasma Enhanced Chemical Vapour Deposition(PECVD)

Optical Microscope Olympus BX53M

Machining Lab

ODESSEY X2 SERIES 3D

3D PRINTER DIMENSION SST 1200ES

µEDM (HYBRID MICRO ELECTRICAL DISCHARGED MACHINE)

PCB PLOTTER (Printed Circuit Board Plotter)

Research Ecosystem

Universiti Teknologi Malaysia UTM Research & Innovation

Centre of Excellence (COE)

IVAT — Institute of High Voltage & High Current IFOG — UTM-MPRC Institute for Oil & Gas CAIRO — Centre for Artificial Intelligence & Robotics CEE — Centre for Engineering Education CACM — Centre for Advanced Composite Materials ICA — Innovation Centre in Agritechnology for Advanced Bioprocessing IBD — Institute of Bioproduct Development MTC — Marine Technology Centre AEROLAB — Aeronautics Research Centre

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