ELECTRON BEAM SYSTEM LAT PLASMA KOREA (E-BEAM)
Description of Equipment
An electron beam from a tungsten filament heats a target, evaporating surface atoms. The vapor condenses on a substrate, forming a thin film. Used in semiconductor manufacturing and various micro/nano systems.
Service Charge
RM110 per hour (without material)
MUHAMMAD SULAIMAN BIN MUHAMMAD ZAIN
m.sulaiman@utm.my
07-533 3360
DISCLAIMER:
1) Basic charge does not include sample preparation, post analysis and consultation
2) Actual charges are subject to the official quotation issued by UIRL laboratory
Effective date: 21 January 2024
Office Address
T03 Building,
University Industry Research Laboratory,
Universiti Teknologi Malaysia,
81310 Skudai,
Johor, Malaysia.
UIRL counter hours
MONDAY – THURSDAY :
8.30am – 12.30pm
2.30pm – 4.30 pm
FRIDAY :
8.30am – 12.30pm
2.30pm – 4.30 pm
Contact us
UIRL Counter :
07-533 3360