MICRO/NANO FABRICATION AND MACHINING LABORATORY
CLEAN ROOM LAB

LAURELL SPIN COATER

MDA-400M-O6, Midas System Mask Aligner

µPG101 Tabletop Micro Pattern Generator,Laser Writer

Stylus Surface Profiler BRUKER DEKTAK XT

LAURELL SPIN COATER

MDA-400M-O6, Midas System Mask Aligner

µPG101 Tabletop Micro Pattern Generator,Laser Writer

Stylus Surface Profiler BRUKER DEKTAK XT