MICRO/NANO FABRICATION AND MACHINING LABORATORY
CLEAN ROOM LAB
LAURELL SPIN COATER
MDA-400M-O6, Midas System Mask Aligner
µPG101 Tabletop Micro Pattern Generator,Laser Writer
Stylus Surface Profiler BRUKER DEKTAK XT
LAURELL SPIN COATER
MDA-400M-O6, Midas System Mask Aligner
µPG101 Tabletop Micro Pattern Generator,Laser Writer
Stylus Surface Profiler BRUKER DEKTAK XT