3D Optical Profiler Microscope SENSOFAR S NEOX
1. Location : Clean Room Lab 01-89-01
2. Detail:
It is 3-in-1 approach where each of the three techniques found in the system are confocal, interferometry and Ai Focus Variation. It has multiple measurement tools such as diameters, parallel distance, angles etc. 1. Confocal profilers – measure smooth to very rough surfaces. It provides the highest lateral resolution, up to 0.15 um line & space, with spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. 2. Ai Focus Variation – measure the shape of large, rough surfaces. 3. Interferometry – measure the surface height of very smooth to moderately rough surfaces, achieving same system noise at any magnification. For PSI, it can achieve system noise better than 0.01 nm.
3.Please refer to P.I.C for quotation
4. Working Hours
Sun – Wednesday
9.00 am – 1.00 pm
2.00 pm – 4.00 pm
Thursday
9.00 am – 12.30 pm;
2.00 pm – 3.00 pm”
5.Status :Â Available for booking
6. PIC
Muna Binti Mohamed
muna@utm.my
07-5610261
7. SAMPLE SUBMISSION FORMS Â click hereÂ