Electron Beam Evaporator (E-Beam),LAT
1. Location : Clean Room Lab 01-89-01/02
2. Detail:
High-energy electron beam is generated from tungsten filament, while electric and magnetic fields direct these electrons towards the target material to heat up the surface of the target.Electron beam position can be confirmed visually to ensure that the electrons bombard the target in the correct location. Upon heating up the target, the vapor pressure of the target increases hence evaporating the surface atoms. The vapor will then travel and condense on the substrate forming thin-layer film.
Specialized applications in semiconductor manufacturing, microelectromechanical systems, nanoelectromechanical systems, and microscopy.
3.Please refer to P.I.C for quotation
4. Working Hours
Sun – Wednesday
9.00 am – 1.00 pm
2.00 pm – 4.00 pm
Thursday
9.00 am – 12.30 pm;
2.00 pm – 3.00 pm”
5.Status :Â Available for booking
6. PIC
Muhammad Sulaiman Bin Muhammad Zain
m.sulaiman@utm.my
07-5557729
7. SAMPLE SUBMISSION FORMS Â click hereÂ