MICRONANO FABRICATION AND MACHINING
LABORATORY
LIST OF EQUIPMENT
LAURELL WS-650-23 (SPIN COATER)
SHIMADZU SMX-1000 PLUS (MICRO CT SCAN)
uPG101 TABLETOP MICRO PATTERN GENERATOR HEIDELBERG INSTRUMENTS (LASER WRITER)
MIDAS SYSTEM MDA-400M-O6 (MASK ALIGNER)
SENSOFAR S NEOX (3D OPTICAL PROFILER MICROSCOPE)
ELECTRON BEAM SYSTEM LAT PLASMA KOREA (E-BEAM)
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION LAT PLASMA KOREA (PECVD)
HYBRID MICRO ELECTRICAL DISCHARGED MACHINE (uEDM) (MICROTOOLS)
DIMENSION SST 1200ES (3D PRINTER)
THE PROTOMAT S103 (PRINTED CIRCUIT BOARD PLOTTER)
BRUKER (3D STYLUS SURFACE PROFILOMETER)
LOCATION
FEEDBACK FORMS
SAMPLE FORMS
LAB VISIT FORMS
Office Address
T03 Building,
University Industry Research Laboratory,
Universiti Teknologi Malaysia,
81310 Skudai,
Johor, Malaysia.
UIRL counter hours
SUNDAY – WEDNESDAY :
8.30am – 12.30pm
2.30pm – 4.30 pm
THURSDAY :
8.30am – 12.30pm
2.15pm – 3.30 pm
Contact us
UIRL Counter :
07-5557583